The VSAN Mass Flow Controller (MFC) is a high-precision instrument designed to measure and automatically control the mass flow rate of gases with exceptional accuracy and repeatability. Combining a Thermal Mass Flow Sensor with an integrated proportional control valve, the MFC continuously monitors the gas flow and automatically adjusts the valve position to maintain the desired flow rate, ensuring stable and reliable process control.
Unlike conventional flow control devices that require separate flow meters and control valves, the VSAN Mass Flow Controller integrates both functions into a single compact unit. This reduces installation complexity, improves control accuracy, and minimizes maintenance requirements. Since the instrument measures mass flow directly, it provides reliable measurement across varying gas pressure and temperature conditions without requiring external compensation.
The VSAN Mass Flow Controller is suitable for a wide range of industrial gases, including Nitrogen (N₂), Oxygen (O₂), Hydrogen (H₂), Air, Argon (Ar), Helium (He), Carbon Dioxide (CO₂), Methane (CH₄), Natural Gas, Ammonia (NH₃), and other compatible process gases. It is available in various flow ranges from low SCCM (Standard Cubic Centimeters per Minute) to high SLPM (Standard Liters per Minute) capacities, meeting the requirements of laboratory, OEM, and industrial applications.
The controller features a high-performance digital electronics module with an optional LCD display for real-time indication of set flow, actual flow, valve status, alarms, and diagnostic information. It supports 0–5 VDC, 0–10 VDC, 4–20 mA, RS485 Modbus RTU, and optional Profibus or Ethernet communication, allowing seamless integration with PLC, DCS, SCADA, and industrial automation systems.
Manufactured using SS316L stainless steel wetted parts, the VSAN Mass Flow Controller offers excellent corrosion resistance, leak-tight construction, and long-term operational reliability. Its fast response time, low pressure drop, and precise flow regulation make it ideal for applications requiring accurate gas dosing, blending, and process control.
The VSAN Mass Flow Controller is widely used in Semiconductor Manufacturing, Chemical Processing, Pharmaceutical Industries, Biotechnology, Food & Beverage, Analytical Laboratories, Fuel Cell Systems, Environmental Monitoring, and Research & Development applications where precise gas flow control is critical.
The VSAN Mass Flow Controller operates on the Thermal Mass Flow Measurement Principle combined with a closed-loop automatic control system.
Inside the controller, a thermal mass flow sensor continuously measures the actual mass flow rate of the gas. Two precision temperature sensors monitor the heat transfer characteristics of the flowing gas. As gas flows through the sensor, it carries heat away from the heated element. The amount of heat dissipated is directly related to the mass flow rate of the gas.
The measured flow signal is continuously compared with the user-defined setpoint entered through an external controller, PLC, or local interface. The integrated microprocessor automatically adjusts the proportional control valve to increase or decrease the gas flow until the actual flow matches the desired setpoint.
This closed-loop feedback control ensures fast response, high stability, and precise flow regulation even when inlet pressure or downstream process conditions vary.
Because the measurement is based on mass flow rather than volumetric flow, the controller provides accurate and repeatable gas flow control across varying operating conditions without requiring separate pressure or temperature compensation.
The VSAN Mass Flow Controller is widely used in industries where precise gas flow measurement, regulation, dosing, and automatic process control are essential.
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